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The principle of ion implantation is to bombard a target material with ions accelerated at high energy. This is a widely used technology in microelectronics for the localized doping of the semiconductors (e.g. for the formation of the P/N junctions). Ion implantation can also be used to introduce other chemical impurities in various substrates. This opens the possibility to synthesize new materials. At higher energy, the ion beams are also used to induce structural modifications or to develop specific analysis techniques. |
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The growing need for sensors accompanies the progress of various techniques for the development of nanomaterials or nano-architected materials based on dielectrics, semiconductors and/or hybrid materials. In this context, the main activities of the '''Functional Materials and Sensors''' theme of our team are part of the study of (i) '''plasmonic nanosensors for the detection of gases or pollutants''', (ii) '''plasmonic sensors based on semiconductor nanoparticles''' and (iii) '''chemical sensors based on organic field effect transistors''' (OFETs). In general, the sensors developed by the team target applications in the fields of '''energy, health and environment'''. |
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<u>'''Ion beam synthesis:'''</u><br> |
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The subjects studied within this theme, targeting various applications, exploit the flexibility of ion implantation associated with the non-equilibrium character of the involved mechanisms and rely on an experimental ion beam facility covering a large range of energies (15 keV to 4 MeV). Our goal is to develop original processes, which can be easily transferred to the industry, for the fabrication of new nanostructures potentially useful for next generations of (opto)-electronic devices, particularly 3rd generation solar cells (in close connection with theme 1). |
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* '''Controlled growth of semiconducting nanocrystals:''' |
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-''Doping of nanocrystals by co-implantation:'' Despite its interest for the realization of electronic devices, doping of nanocrystals (nc) turns out to be a difficult task because of their nanometer size. In our group, we study simultaneously the doping and the growth of nc's by co-implantation of silicon (and/or germanium) and of the usual dopant (As, P and B) into silicon oxide (or other dielectric) thin films. We study in detail the influence of the implantation and annealing conditions on the physical properties of the resulting nc's. This study is performed in close collaboration with theme 1, for its possible application in tandem solar cells.<br> |
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-''Integration of optoelectronic functions in Si technology:'' We study the ion beam synthesis of III-V nc's embedded in Si or SiOxNy by co-implantation of the group III and group V elements, as well as the performances of devices including such nc's. Some results exist in the literature concerning the ion beam synthesis of binary III-V nc's in Si and SiO2. However, these studies are only preliminary, and the growth of more complex nc's (ternary or even quaternary alloys) has never been investigated. The use of these ternary or quaternary alloys could open the way of a fine tuning of the optoelectronic properties, by controlling independently the band gap width and the lattice parameter (i.e. the coherence of the nc's with its environment). The targeted applications include optoelectronic devices fully compatible with the Si technology, as well as 3rd generation solar cells. |
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* '''Growth of graphene films by C implantation and diffusion in metallic matrixes:''' |
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We study an original route for the growth of controlled graphene film, using the mature ion implantation technology. In this process, the feasibility of which has already been proven, carbon is implanted in a diffusing metallic matrix (Ni, Cu, Ru), and then its segregation is induced by a high temperature anneal (possibly during the implantation itself). Depending on the detailed experimental conditions, it is foreseen to be able to induce the graphene film growth either at the surface of the metallic film or at the metal/substrate interface. This new method offers several advantages, as compared with the usual CVD method: i) precise and uniform control of the C implantation dose; ii) possibility to dope the graphene film by co-implantation of C and of the dopant; iii) selective growth at the metal/substrate interface by adapting the implantation energy and the carbon diffusivity (choice of the metal and of the anneal temperature); iv) easy integration in real electronic devices, since this technique uses a standard tool of the microelectronic. This research is performed in collaboration with the LPICM laboratory. |
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<u>'''Structural modifications and analysis:'''</u><br> |
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=Developed topics= |
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We contribute to various projects requiring ion beam related technologies or analysis. For example: |
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*''Characterization of the metallic contamination'' in photovoltaic silicon wafers obtained by a new molding technique (French ANR project "MOSAIQUE", collaboration with CEA-Ines) |
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*''Exfoliation of monocrystalline diamond'' for the fabrication of large area substrates for particles detectors (French ANR project "MONODIAM-HE", collaboration with IPHC-DRS) |
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== Nano plasmonic sensors == |
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''' Persons involved: Nicolas Javahiraly, François Le-Normand, Nacer Boubiche''' <br> |
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'''Collaborations: University of Lyon 1.''' |
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Hydrogen is presented as the sustainable energy carrier of the future, as the hydrogen cycle is one of the most environmentally friendly energy solutions. Hydrogen can be used to produce, store and transport energy and its possible applications are very varied. <br> |
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But the use of hydrogen presents a significant risk if it is not controlled because it is 4% explosive in the air. Hence the current need to develop nanosensors to detect hydrogen leaks for safety reasons. <br> |
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This activity of the group is dedicated to the research of innovative optical sensors for hydrogen leakage exploiting the properties of MIM (Metal Insulator Metal) structures, original nanoparticles (simple NP, core-shell systems...) and their effects (SPR and LSPR), to bring a real advance in detection performances for example in terms of sensitivity and response time (ANR NHYLEDECT (carrier: Nicolas Javahiraly) in collaboration with the University of Lyon 1). <br> |
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[[File:MIM.jpg|gauche|300px]] |
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[[File:Im3 NJ.jpg|gauche|300px]] |
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<div class="center"> Figure 1: Example of results obtained in the case of a multilayer MIM (Gold/SiO2/Pd) structure on optical fibre. Note in dotted line the hydrogenated case. |
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== Micropollutant sensors == |
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''' Persons involved: Nicolas Javahiraly, François Le-Normand''' <br> |
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'''Collaborations: IPCMS, University of Lyon 1.''' |
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The detection of micropollutants by original systems is one of the important issues of our society. The cancer agency of the WHO (World Health Organization) has classified five pesticides as "possible" or "probable" carcinogens for humans. This activity of the MACEPV Group is dedicated to the study of innovative pollutant sensors exploiting the interaction properties between light and original nanostructured materials. Detection is based on the variation of properties, for example, optical properties of the materials used in the presence of the molecule to be detected. Several avenues of investigation are under study: detection by Surface Plasmon Resonance (SPR) or Local Surface Plasmon Resonance (LSPR) and, on the other hand, detection using functionalized carbon structures (Diamond-Like Carbon (DLC) type) but also those exploiting the effects of variations in different parameters (conductivity, resistivity, etc.). |
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== Plasmonic biosensors based on semiconductor nanoparticles == |
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''' Persons involved: G. Ferblantier, E. Steveler, D. Muller ''' <br> |
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'''Collaborations: IJL (Nancy), CEMES (Toulouse), Mc Master (Canada).''' |
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Semiconductor nanoparticles (Nps-SC), especially of silicon, integrated in a dielectric matrix, have aroused great interest in recent decades because of their many possible applications in optoelectronics (IR photonic conversion, heterojunction photovoltaic cells, efficient absorbers). In recent years, electrically doped Nps-SCs have attracted a lot of attention because of the possibility of obtaining localized surface plasmon resonances (LSPRs) whose position can be adjusted according to the amount of free carriers in the particles. This adjustment, which is impossible for metallic nanoparticles, represents a major advance in the use of LSPRs in the field of sensors. <br> |
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Currently, one of the team's activities is to explore the possibility of using these hyperdoped semiconductor nanoparticles (fabricated by sputtering, PECVD or ion implantation) to generate surface electron waves, i.e., surface plasmons, to detect chemical and/or biological agents by modifying the localized plasmon wave. |
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== Chemical Sensors OFETs == |
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''' Persons involved: Yves-Andre Chapuis, Patrick Lévêque, Thomas Heiser''' <br> |
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Chemical sensors based on organic field effect transistors (OFETs) are currently facing a number of technological challenges such as improving sensitivity, selectivity, ambient stability and manufacturing costs. In ICube's MaCEPV team, we are exploring the performance of different types of organic semiconductor (OSC) based materials in the detection of gas species through morphology control and molecular engineering. For example, we are exploiting materials based on "one-dimensional (1D) monocrystalline nanowires" [1], which offer the prospect of faster and more accurate response and recovery rates for chemical detection. In parallel to this work, critical factors from gas kinetics to sensor-analyte interaction, as well as the examination of detection mechanisms are addressed. We are also interested in applications of flexible sensors that can be integrated into skin or clothing. <br> |
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[1] : ANR Transfilsen (2009-2013), « Transfilsen: Elaboration of transistors based on functionalized and insulated molecular wires and applications in chemical sensors » |
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== Quantum sensors == |
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''' Persons involved: D. Muller''' <br> |
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'''Collaborations: J. Tribolet (Institut of Chemistry Strasbourg) M. Lazar (L2n Troyes)''' |
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The "Double Electron Electron Resonance" (DEER), allows the measurement of the magnetic dipole coupling between 2 electron spins using pump-probe magnetic resonance experiments with two different microwave frequencies. Associated with spins of the colored centers obtained by ion implantation (for example the NV center of diamond), this technique allows the detection of a small number of qubits, or even a single spin qubit. |
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We plan to develop this technique (OD-DEER by optical detection of photoluminescence) in order to reach sensitivities of a single spin probe which could eventually have important biomedical applications. However, to achieve such ultimate sensitivity, the DEER methods must be combined with a quantum sensor having one or more optically detectable colored centers near the surface. We are working on developing by ion implantation such colored centers with adequate localization and especially maintaining a sufficient coherence time (qq 10µs) at room temperature. |
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[[#bidule|Back to contents]] |
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Version du 12 mars 2020 à 11:47
The growing need for sensors accompanies the progress of various techniques for the development of nanomaterials or nano-architected materials based on dielectrics, semiconductors and/or hybrid materials. In this context, the main activities of the Functional Materials and Sensors theme of our team are part of the study of (i) plasmonic nanosensors for the detection of gases or pollutants, (ii) plasmonic sensors based on semiconductor nanoparticles and (iii) chemical sensors based on organic field effect transistors (OFETs). In general, the sensors developed by the team target applications in the fields of energy, health and environment.
Developed topics
Nano plasmonic sensors
|
Persons involved: Nicolas Javahiraly, François Le-Normand, Nacer Boubiche
|
Hydrogen is presented as the sustainable energy carrier of the future, as the hydrogen cycle is one of the most environmentally friendly energy solutions. Hydrogen can be used to produce, store and transport energy and its possible applications are very varied.
But the use of hydrogen presents a significant risk if it is not controlled because it is 4% explosive in the air. Hence the current need to develop nanosensors to detect hydrogen leaks for safety reasons.
This activity of the group is dedicated to the research of innovative optical sensors for hydrogen leakage exploiting the properties of MIM (Metal Insulator Metal) structures, original nanoparticles (simple NP, core-shell systems...) and their effects (SPR and LSPR), to bring a real advance in detection performances for example in terms of sensitivity and response time (ANR NHYLEDECT (carrier: Nicolas Javahiraly) in collaboration with the University of Lyon 1).
 |
Micropollutant sensors
|
Persons involved: Nicolas Javahiraly, François Le-Normand
|
The detection of micropollutants by original systems is one of the important issues of our society. The cancer agency of the WHO (World Health Organization) has classified five pesticides as "possible" or "probable" carcinogens for humans. This activity of the MACEPV Group is dedicated to the study of innovative pollutant sensors exploiting the interaction properties between light and original nanostructured materials. Detection is based on the variation of properties, for example, optical properties of the materials used in the presence of the molecule to be detected. Several avenues of investigation are under study: detection by Surface Plasmon Resonance (SPR) or Local Surface Plasmon Resonance (LSPR) and, on the other hand, detection using functionalized carbon structures (Diamond-Like Carbon (DLC) type) but also those exploiting the effects of variations in different parameters (conductivity, resistivity, etc.).
Plasmonic biosensors based on semiconductor nanoparticles
|
Persons involved: G. Ferblantier, E. Steveler, D. Muller
|
Semiconductor nanoparticles (Nps-SC), especially of silicon, integrated in a dielectric matrix, have aroused great interest in recent decades because of their many possible applications in optoelectronics (IR photonic conversion, heterojunction photovoltaic cells, efficient absorbers). In recent years, electrically doped Nps-SCs have attracted a lot of attention because of the possibility of obtaining localized surface plasmon resonances (LSPRs) whose position can be adjusted according to the amount of free carriers in the particles. This adjustment, which is impossible for metallic nanoparticles, represents a major advance in the use of LSPRs in the field of sensors.
Currently, one of the team's activities is to explore the possibility of using these hyperdoped semiconductor nanoparticles (fabricated by sputtering, PECVD or ion implantation) to generate surface electron waves, i.e., surface plasmons, to detect chemical and/or biological agents by modifying the localized plasmon wave.
Chemical Sensors OFETs
|
Persons involved: Yves-Andre Chapuis, Patrick Lévêque, Thomas Heiser |
Chemical sensors based on organic field effect transistors (OFETs) are currently facing a number of technological challenges such as improving sensitivity, selectivity, ambient stability and manufacturing costs. In ICube's MaCEPV team, we are exploring the performance of different types of organic semiconductor (OSC) based materials in the detection of gas species through morphology control and molecular engineering. For example, we are exploiting materials based on "one-dimensional (1D) monocrystalline nanowires" [1], which offer the prospect of faster and more accurate response and recovery rates for chemical detection. In parallel to this work, critical factors from gas kinetics to sensor-analyte interaction, as well as the examination of detection mechanisms are addressed. We are also interested in applications of flexible sensors that can be integrated into skin or clothing.
[1] : ANR Transfilsen (2009-2013), « Transfilsen: Elaboration of transistors based on functionalized and insulated molecular wires and applications in chemical sensors »
Quantum sensors
|
Persons involved: D. Muller
|
The "Double Electron Electron Resonance" (DEER), allows the measurement of the magnetic dipole coupling between 2 electron spins using pump-probe magnetic resonance experiments with two different microwave frequencies. Associated with spins of the colored centers obtained by ion implantation (for example the NV center of diamond), this technique allows the detection of a small number of qubits, or even a single spin qubit.
We plan to develop this technique (OD-DEER by optical detection of photoluminescence) in order to reach sensitivities of a single spin probe which could eventually have important biomedical applications. However, to achieve such ultimate sensitivity, the DEER methods must be combined with a quantum sensor having one or more optically detectable colored centers near the surface. We are working on developing by ion implantation such colored centers with adequate localization and especially maintaining a sufficient coherence time (qq 10µs) at room temperature.